Equipment

Thin Film Deposition Tool

pvd straight sputter

Model:

KLJ PVD-75 (Sputter only)

Capabilities:

Thin film sputter deposition tool, using RF or DC power.

Cost:

For UR users

For nonUR users

Calendar for Reservations:

PPMS Scheduler

Specifications:

  • RF (insulating materials) or DC (conductive material) deposition.
  • Support for substrates up to 8".
  • Sapphire crystal thickness monitor.
  • Substrate heating to 300C.
  • Easy to use touchscreen interface.

Ions are accelerated towards the source material (3" target), ablating away material which is then deposited onto the substrate. This deposition cloud results in good sidewall coverage of substrate features.