Equipment

Clean Bench

rca clean bench

Model:

Reynolds Tech RCA Bench

Capabilities:

Wet chemistry processing bench designed for industry standard RCA chemical cleaning.

Cost:

For UR users

For nonUR users

Calendar for Reservations:

PPMS Scheduler

Specifications:

  • Heated, perminant chemistry baths designed for RCA clean (SC-1, HF Strip, SC-2).
  • Built in N2 and DI water dispensers, including foot operated sink.
  • Internal DI rinse tanks.
  • Process timers.

On-line Manual:

sop_rca_clean_bench.pdf

A chemical safe workspace designed for safe processing of hazardous or noxious chemicals including acids, bases and organic solvents designed specifically for RCA cleaning. This consists of three steps - The first (SC-1, 10min @ 75C) consists of ammonium hydroxide, hydrogen peroxide and DI water designed to remove organic contamination. Next is a dilute hydroflouric acid strip (HF, 1min @ room temperature)  to remove any native oxides that may be present. This is followed by the final step (SC-2, 10min @ 75C) a bath of hydrochloric acid, hydrogen peroxide and DI water designed to remove ionic contamination. Substrates recieve a minimum 5 minute DI water rinse after each bath. All appropriate Personal Protective Gear (P.P.E.) must be worn while working with this bench.